This paper documents the development, characterization, and application of a high-resolution thin-film magnetic-field probe. Probe diameter ranged from 5-μm to 100-μm. The 100-μm probe exhibits a 250-7μm improvement in spatial resolution compared to a conventional loop probe, measured at a height of 250 μm over differential traces with a 118-μm spacing. Electric field rejection was improved using shielding and using a 180-degree hybrid junction to separate common-mode (electric field) and differential-mode (primarily magnetic field) coupling. A network analyzer with narrow band filtering was used to detect the relatively weak signal from the probe and to allow detection of phase information. An application of the probe is demonstrated where the probe is used to identify the magnitude and phase of magnetic fields produced by currents in very closely-spaced IC package pins.
S. Li et al., "Development and Application of a High-Resolution Thin-Film Probe," Proceedings of the IEEE International Symposium on Electromagnetic Compatibility (2007, Honolulu, HI), Institute of Electrical and Electronics Engineers (IEEE), Jan 2007.
The definitive version is available at http://dx.doi.org/10.1109/ISEMC.2007.47
IEEE International Symposium on Electromagnetic Compatibility, EMC 2007 (2007: Jul. 9-13, Honolulu, HI)
Electrical and Computer Engineering
Materials Science and Engineering
Electromagnetic Compatibility (EMC) Laboratory
Keywords and Phrases
Probe Antennas; Scanning Antennas
Library of Congress Subject Headings
Thin film devices
International Standard Book Number (ISBN)
International Standard Serial Number (ISSN)
Article - Conference proceedings
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