Abstract

A composition is derived from an addition polymerizable organotitanium polymer which upon exposure to an oxygen plasma or baking in air, is converted to titanium dioxide (titania) or is converted to a mixed, titanium-containing metal oxide. The metal oxide formed in situ imparts etch- resistant action to a patterned photoresist layer. The composition may also be directly deposited and patterned into permanent metal oxide device features by a photolithographic process.

Department(s)

Chemistry

Second Department

Materials Science and Engineering

Patent Application Number

09/259,229

Patent Number

US 6,303,270 B1

Document Type

Patent

Document Version

Final Version

File Type

text

Language(s)

English

Rights

© 2001 The Curators of the University of Missouri, All rights reserved.


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