This paper presents a new strategy of integrating lateral silicon nanospikes using metal-assisted chemical etching (MacEtch) on the sidewall of micropillars for on-chip bacterial study. Silicon nanospikes have been reported to be able to kill bacteria without using chemicals and offer a new route to kill bacteria and can prevent the overuse of antibiotics to reduce bacteria. We demonstrated a new methodology to fabricate a chip with integrated silicon nanospikes onto the sidewalls of micropillars inside the microfluidic channel and attested its interactions with the representative gram-negative bacteria Escherichia coli. The results of colony-forming unit (CFU) calculation showed that 80% bacteria lost their viability after passing through the chip. Moreover, the results of adenosine triphosphate (ATP) measurement indicated that the chip with lateral silicon nanospikes could extract more than two times ATP contents compared with the chip without lateral silicon nanospikes, showing potential for using the chip with lateral silicon nanospikes as a bacterial lysing module.


Mechanical and Aerospace Engineering


National Natural Science Foundation of China, Grant 21874116

Keywords and Phrases

anti-bacterial; lab on a chip; lateral silicon nanospikes; metal-assisted chemical etching; nanofabrication

International Standard Serial Number (ISSN)


Document Type

Article - Journal

Document Version

Final Version

File Type





© 2019 The Authors, All rights reserved.

Publication Date

12 Jul 2019