A metasurface integrated microbolometer having a sensing layer (e.g., SixGeyO1-x-y). The presence of the metasurface provides selectivity with respect to wavelength, polarization and angle-of-incidence. The presence of the metasurface into the microbolometer affects conversion of electromagnetic to thermal energy, thermal response, electrical integration of the microbolometer, and the tradeoff between resistivity and temperature coefficient of resistance, thereby allowing the ability to obtain a sensing with high temperature coefficient of resistance with lower resistivity values than that of films without the metasurface. The presence of the metasurface removes the need for a Fabry-Perot cavity.
M. Almasri and E. C. Kinzel, "Frequency-Selective Metasurface Integrated Uncooled Microbolometers," U.S. Patents, Jan 2020.
Mechanical and Aerospace Engineering
Patent Application Number
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23 Jan 2020