Abstract

A metasurface integrated microbolometer having a sensing layer (e.g., SixGeyO1-x-y). The presence of the metasurface provides selectivity with respect to wavelength, polarization and angle-of-incidence. The presence of the metasurface into the microbolometer affects conversion of electromagnetic to thermal energy, thermal response, electrical integration of the microbolometer, and the tradeoff between resistivity and temperature coefficient of resistance, thereby allowing the ability to obtain a sensing with high temperature coefficient of resistance with lower resistivity values than that of films without the metasurface. The presence of the metasurface removes the need for a Fabry-Perot cavity.

Department(s)

Mechanical and Aerospace Engineering

Patent Application Number

US16/387,514

Patent Number

US20200025619A1

Document Type

Patent

Document Version

Final Version

File Type

text

Language(s)

English

Rights

© 2019 The Curators of the University of Missouri, All rights reserved.

Publication Date

23 Jan 2020

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