Feasibility Study of Single-Crystal Si Island Manufacturing by Microscale Printing of Nanoparticles and Laser Crystallization
Nonvacuum printing of single crystals would be ideal for high-performance functional device (such as electronics) fabrication yet challenging for most materials, especially for inorganic semiconductors. Currently, the printed films are dominant in amorphous, polycrystalline, or nanoparticle films. In this article, manufacturing of single-crystal silicon micro/nano-islands is attempted. Different from traditional vapor deposition for silicon thin-film preparation, silicon nanoparticle ink was aerosol-printed followed by confined laser melting and crystallization, allowing potential fabrication of single-crystal silicon micro/nano-islands. It is also shown that as-fabricated Si islands can be transfer-printed onto polymer substrates for potential application of flexible electronics. The additive nature of this technique suggests a scalable and economical approach for high-crystallinity semiconductor printing.
W. Shou et al., "Feasibility Study of Single-Crystal Si Island Manufacturing by Microscale Printing of Nanoparticles and Laser Crystallization," ACS Applied Materials and Interfaces, vol. 11, no. 37, pp. 34416 - 34423, American Chemical Society (ACS), Sep 2019.
The definitive version is available at https://doi.org/10.1021/acsami.9b09577
Mechanical and Aerospace Engineering
Intelligent Systems Center
Second Research Center/Lab
Center for Research in Energy and Environment (CREE)
Third Research Center/Lab
Center for High Performance Computing Research
Keywords and Phrases
Aerosol Printing; Confinement; Flexible Electronics; Laser Crystallization; Silicon Nanoparticle Ink
International Standard Serial Number (ISSN)
Article - Journal
© 2019 American Chemical Society (ACS), All rights reserved.
01 Sep 2019
The work is supported by the collaborative NSF grant CMMI-1363392 and 1363313 to C.G. and H.P. and NSF grant CMMI-1635256. This research was also partially supported by the Intelligent System Center (ISC) and the Material Research Center (MRC) at the Missouri University of Science and Technology and ORAU Ralph E. Powe Junior Faculty Enhancement Award.