Thermal Radiation from Microsphere Photolithography Patterned Metasurfaces


Frequency-Selective Surfaces (FSS) type metasurfaces consist of periodic arrays of antenna elements. They can be scaled from microwave frequencies to the infrared wavelengths where they allow the scattering response to be engineered. This includes the spectral absorptance/emittance. At IR wavelengths, the features sizes of the metasurface are sub-micron which poses manufacturing issues for the meter squared scales required for most heat transfer applications. In this paper, we investigate the use of Microsphere Photolithography for creating spectrally selective metasurfaces. This approach uses a self-assembled array of microspheres as a lens array to focus a lattice of photonic jets into photoresist. These can be used with lift-off to create metal-insulator-metal (MIM) or even five-layer of resonant structures. We study the design constraints and synthesize a broadband emitter in the mid-infrared. The spectral absorptance is measured experimentally using FTIR. The structures are then tested at moderate temperatures to demonstrate the ability to affect surface temperature/heat flux in practical applications.

Meeting Name

ASME 2017 Heat Transfer Summer Conference, HT 2017 (2017: Jul. 9-12, Bellvue, WA)


Mechanical and Aerospace Engineering


The authors gratefully acknowledge financial support from NSF (ECCS-1509589, CMMI-1653792), as well as Material Research and Energy Research and Development Centers at Missouri University of Science and Technology.

Keywords and Phrases

Fighter aircraft; Fourier transform infrared spectroscopy; Frequency selective surfaces; Industrial research; Manufacture; Metal insulator boundaries; Microspheres; MIM devices; Photolithography; Photoresists; Thermodynamic properties; Transport properties; Frequency selective surface (FSS); Heat transfer applications; Infrared wavelengths; Metal insulator metals; Moderate temperature; Resonant structures; Self-assembled arrays; Surface temperatures; Heat transfer

International Standard Book Number (ISBN)


Document Type

Article - Conference proceedings

Document Version


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© 2017 American Society of Mechanical Engineers (ASME), All rights reserved.

Publication Date

01 Jul 2017