Pure nickel and gold thin films were vacuum-deposited on (111) silicon single crystals. When Ni/Au/Si or Au/Ni/Si samples were heated to about 550° in situ, hexagonal or deformed hexagonal shaped crystallites were formed on the silicon substrates. The composition of these crystallites was determined by using x-ray diffraction, scanning electron microscopy and scanning Auger microprobe methods. The crystallites were identified as NiSi2. The crystal-lites on the (111) silicon plane parallel to the surface appeared as regular hexagons while the inclined crystal-lites resembled trapezia. The results of Auger spectra and in-depth composition profiles for Ni, Au, and Si showed that the NiSi2 crystallites are islands in a matrix of Au-Si eutectic. © 1976 American institute of mining, metallurgical, and petroleum engineers, inc.
K. H. Yoon et al., "Intermetallic Reactions In Vacuum-deposited Nickel And Gold Films On (111) Silicon Single Crystals," Journal of Electronic Materials, vol. 5, no. 2, pp. 263 - 273, Springer, Apr 1976.
The definitive version is available at https://doi.org/10.1007/BF02652907
Materials Science and Engineering
Keywords and Phrases
intermetallics; suicide formation; thin films
International Standard Serial Number (ISSN)
Article - Journal
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01 Apr 1976