Title

Glass Surface Modifications During Ion Beam Sputtering

Abstract

X-ray photoelectron spectroscopy (XPS) has been used to characterize changes in the surface compositions and structures of some simple binary oxide glasses bombarded with low energy (2.5 keV) argon ions. The outermost surface regions of sodium silicate glasses are dealkalized by the ion beam, and changes in the surface oxygen bonding, as determined from decomposed O1s spectra, indicate that the glass surfaces repolymerize after sodium depletion. The surfaces of sodium phosphate glasses, on the other hand, become enriched in sodium as a result of sputtering, and changes in the O1s spectra indicate a depolymerization effect. These apparently different behaviors can be explained by the preferential sputtering of selected glass components. © 1988.

Department(s)

Materials Science and Engineering

International Standard Serial Number (ISSN)

0022-3093; 1873-4812

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 1988 Elsevier, All rights reserved.

Publication Date

01 Jan 1988

Link to Full Text

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