Masters Theses


"The current revolution witnessed by nanotechnology is facing several challenges such as manufacturing of nano sized devices economically on a large scale. Focused ion beam (FIB) technology is one of the widely used approaches for nano-manufacturing due to its versatile nature. It provides accurate machining and process repeatability and has a range of applications. Major challenges for the current FIB process are the tradeoffs between quality, the processing time, and the long planning time. This research provides a pathway to eliminate the current problems facing nanotechnology. Using MATLAB and the Helios 600 FIB/SEM instrument available, modeling and analyses are carried out to find the optimized process planning for arbitrary 3D nanofeatures. This research provides information on the current status of the FIB machining process, while at the same time discusses the challenges in FIB manufacturing. It provides a methodology that can be used to achieve an increase in planning and processing efficiency without sacrificing fabrication quality. This is done with the help of an iterative algorithm developed to achieve the optimized solution to a quadratic programming problem. Furthermore, the analyses carried out provides with more information on the choice of the scanning spacing, its corresponding effects on the quality of the product and computational efficiency. This is illustrated with the threshold step size selection and the beam overlap phenomenon. The thesis concludes with the set goal of achieving an increase in the planning and processing efficiency while maintaining the quality. It provides possible future course of actions in the same field, such as the beam flexibility criteria, using the additive process and the serpentine scan for manufacturing"--Abstract, page iii.


Qin, Ruwen

Committee Member(s)

Liu, Zhen
Cudney, Elizabeth A.


Engineering Management and Systems Engineering

Degree Name

M.S. in Engineering Management


Missouri University of Science and Technology. Research Board


Missouri University of Science and Technology

Publication Date

Spring 2012


ix, 86 pages

Note about bibliography

Includes bibliographical references (pages 71-72).


© 2012 Sushrut Shekhar Naik, All rights reserved.

Document Type

Thesis - Open Access

File Type




Subject Headings

Focused ion beams -- Industrial applications
Mathematical optimization -- Industrial applications
Nanostructured materials industry

Thesis Number

T 9976

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