"Float zone refining using simultaneous RF induction heating and electromagnetic levitation has proven to be the best technique for producing high purity silicon for the semiconductor industry.
A study of the power requirements for floating molten zones, of load to source impedance matching, and of considerations for RF heating coil design was conducted to determine possible methods of improving the technique. It is shown that the power requirements are within reason, that impedance matching can be improved by varying network parameters, and that certain vital items must be assured in the design of different RF heating coils.
It is believed that some of this research is directly applicable to the extension of the float zone refining technique to larger diameter silicon rods"--Abstract, page ii.
Van Doren, Thomas, 1940-
Boone, Jack L.
Parks, William F.
Electrical and Computer Engineering
M.S. in Electrical Engineering
University of Missouri--Rolla
vii, 65 pages
© 1973 John Allen Reynolds, All rights reserved.
Thesis - Open Access
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Link to Catalog Record
Reynolds, John Allen, "A study of RF induction heating and float zone refining of silicon" (1973). Masters Theses. 3482.