"The effect of stress from the substrate on the crystallographic orientation of tetragonal Lead Zirconate Titanate (PZT) thin films was investigated, and it was found that films under compressive stress during cooling through the Curie temperature (from being deposited on a substrate with a larger coefficient of thermal expansion (CTE) than PZT) tend to orient in thedirection. Conversely, films under tensile stress during processing due to a low-CTE substrate prefer (100) orientation.
While stress is important in determining eventual film texture, it is not the only factor. Platinum, the electrode of choice for most applications of PZT thin films, is most easily deposited with a (111) texture that provides a low-energy template for the subsequent nucleation and growth of (111) PZT. Films of different orientations, however, have been successfully deposited on (111) Pt, so the nucleation and growth of oriented PZT must not be completely electrode template controlled. Therefore solution, electrode texture, heat treatment, and stress effects on the orientation of tetragonal PZT films were also investigated.
A 5-minute crystallization step above 420°C produces PZT thin films with preferred (100) orientation, even on (111) Pt electrodes. Hot-sputtering Pt on (100) MgO single crystals can result in a (100) electrode texture, which favors film growth along one of the cubic directions, or . Films oriented in the direction were found to have Pr values as high as 46µC/cm2 and effective d31 values as large as -57pm/V. Films oriented along the direction had respective Pr and effective d31 values of only 27µC/cm2 and -37pm/V. Measured dielectric constants followed the opposite trend, with values 800 and 425 for virgin films oriented in the and directions, respectively"--Abstract, page iii.
Anderson, H. U. (Harlan U.)
Clem, Paul G.
Schwartz, Robert W.
Materials Science and Engineering
M.S. in Ceramic Engineering
University of Missouri--Rolla
xii, 89 pages
© 2002 Geoffrey Lee Brennecka, All rights reserved.
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Brennecka, Geoffrey L., "Stress-induced orientation in chemical solution deposited tetragonal Lead Zirconate Titanate thin films" (2002). Masters Theses. 2171.
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