Effectiveness Analysis of De-Embedding Method for Typical TSV Pairs in a Silicon Interposer


In this paper, a de-embedding method to extract the performance of a Through-Silicon-Via (TSV) pair is proposed, using a set of specially designed test patterns to remove the pads and connection trace. Considering in real implementations, wafer probe measurements are required to access the test structures, and any errors in the probe calibration affect the test pattern measurements, a micro-probe model is built in with the test. Short-Open-Load (SOL) calibration method is used with the simulation results to calibrate or correct to the tips of the micro-probe used in all test patterns. Calibrated responses for the test patterns consisting of probing pads, traces and TSV pair, thus are used with previously proposed de-embedding algorithm to characterize the TSV pair. The effectiveness and the robustness of the de-embedding method against probe calibration errors are tested with the full wave simulation results and analytical calculations.

Meeting Name

23rd IEEE Conference on Electrical Performance of Electronic Packaging and Systems, EPEPS 2014 (2014: Oct. 26-29, Portland, OR)


Electrical and Computer Engineering

Research Center/Lab(s)

Center for High Performance Computing Research

Second Research Center/Lab

Electromagnetic Compatibility (EMC) Laboratory

Keywords and Phrases

Calibration; Electronics packaging; Integrated circuit interconnects; Integrated circuit manufacture; Probes; Silicon wafers; Sols; analytical; Calibration patterns; de-embedded; Full-wave simulations; TSV; Three dimensional integrated circuits; SOL calibration

International Standard Book Number (ISBN)


Document Type

Article - Conference proceedings

Document Version


File Type





© 2014 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.

Publication Date

01 Oct 2014