An in situ self-diagnostic technique for a dissolved oxygen microsensor is proposed in an effort to devise an intelligent microsensor system with an integrated electro-chemical actuation electrode. With a built-in platinum microelectrode that surrounds the microsensor, two kinds of microenvironments (oxygen-saturated or oxygen-depleted phases) can be created by water electrolysis depending on the polarity. The functionality of the microsensor can be checked during these microenvironment phases. The polarographic oxygen microsensor is fabricated on a flexible polyimide substrate (Kapton/sup ©/) and the influences of electrochemical and hydrodynamic conditions on the sensor responses have been investigated.
C. Kim and C. Lee, "Electrochemical and Hydrodynamic Interferences on the Performance of an Oxygen Microsensor with Built-in Electrochemical Microactuator," Proceedings of IEEE Sensors, 2003, Institute of Electrical and Electronics Engineers (IEEE), Jan 2003.
The definitive version is available at https://doi.org/10.1109/ICSENS.2003.1279153
IEEE Sensors, 2003
Electrical and Computer Engineering
Chemical and Biochemical Engineering
Keywords and Phrases
O2; Built-In Electrochemical Microactuator; Chemical Sensors; Electrochemical Interferences; Flexible Polyimide Substrate; Hydrodynamic Interferences; Intelligent Microsensor System; Microactuators; Microsensors; Oxygen Microsensor; Oxygen-Depleted Phases; Oxygen-Saturated Phases; Polarity; Water Electrolysis
Article - Conference proceedings
© 2003 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.
01 Jan 2003