A new dissolved oxygen monitoring microsystem is proposed to achieve in situ intelligent self-calibration by using an electrochemically actuated fluidic system. The electrochemical actuation, based on water electrolysis, plays two critical roles in the proposed microsystem. First, the electrochemically generated gases serve as the calibrants for the in situ 2-point calibration/diagnosis procedure of the microsensor in a chip. Secondly, the electrochemical generation and collapse of gas bubbles provide the driving force of the bidirectional fluidic manipulation for sampling and dispensing of the sample solution. A microsystem including a dissolved oxygen microprobe, electrochemical actuators, and a fluidic structure are prepared by microfabrication technology and its performance is characterized.

Meeting Name

IEEE Sensors, 2004


Electrical and Computer Engineering

Second Department

Chemical and Biochemical Engineering

Keywords and Phrases

O2; Bidirectional Fluidic Manipulation; Bubbles; Calibration; Chemical Sensors; Dissolved Oxygen Microsensor; Electrochemical Actuation; Electrochemical Devices; Electrochemically Actuated Fluidics; Electrochemically Generated Gases; Electrolysis; Gas Bubbles Collapse; Gas Bubbles Generation; in Situ Intelligent Self-Calibration; Intelligent Microsensor System; Intelligent Sensors; Microfabrication Technology; Microfluidics; Microprobe; Microsensors; Oxygen; Sample Solution Dispensing; Sample Solution Sampling; Water Electrolysis

Document Type

Article - Conference proceedings

Document Version

Final Version

File Type





© 2004 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.

Publication Date

01 Jan 2004