A study of the amorphization of silicon by ion implantation
Ph. D. in Physics
University of Missouri--Rolla
© 1976 John Robert Dennis, All rights reserved.
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Full-text not available: Request this publication directly from Missouri S&T Library or contact your local library.http://merlin.lib.umsystem.edu/record=b1068080~S5
Dennis, John Robert, "A study of the amorphization of silicon by ion implantation" (1976). Doctoral Dissertations. 422.
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