The breakdown voltage Vb of glow discharge of an organic monomer generally decreases as the system pressure decreases; however, below a certain threshold pressure, the breakdown voltage increases with decreasing system pressure. In the pressure range below 100 mTorr, the breakdown voltage generally increases as a linear function of 1 /p, where p is the system pressure of the reactor. In this region, glow discharge without magnetic enhancement often yields unstable discharge, which is associated with a very steep slope of a line in the Vh vs /p plot. The similar plots for glow discharges of non-polymer-forming gases, such as He, Ar, and 02, do not follow the simple linear relationship, but a more or less linear increase is followed by a plateau. Effects of magnetic field on the breakdown phenomena were investigated by using planar parallel electrodes with circular arrangement of permanent magnets. Three different electrode systems with slightly different magnetic field profiles were used to investigate the effects of magnetic field intensity and its profile in the interelectrode space. The increasing intensity of magnetic field generally reduces the slope of Vb vs /p and produces more stable glow discharge in the lower pressure region where stable glow discharge cannot be created without magnetic enhancement. © 1989, American Vacuum Society. All rights reserved.



International Standard Serial Number (ISSN)

1520-8559; 0734-2101

Document Type

Article - Journal

Document Version

Final Version

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© 2023 American Vacuum Society; American Institute of Physics, All rights reserved.

Publication Date

01 Jan 1989

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Chemistry Commons