Plasma polymerization of tetramethyldisiloxane by a magnetron glow discharge was studied. The glow discharge was created between parallel electrodes with a 10 kHz electric power source with a superimposed magnetic field using permanent bar magnets. Polymers were deposited onto moving substrates placed on the surface of a rotating disc located in between the electrodes. The deposition rates were determined with a quartz crystal thickness monitor placed on the plane of the rotating disc and just outside the edge of the disc. The current-voltage relationship observed for plasma polymerization of the monomer depends on the monomer feed rate and the conditioning of the electrodes or the establishment of a steady state surface in the polymer-forming plasma, which also depends mainly on the monomer feed rate. Consequently, plasma polymerization cannot be correlated to single operational parameters such as the discharge current, the power or the monomer feed rate in a simple manner. However, when the deposition rate was expressed as Rp/FM, where Rp is the polymer deposition rate, F is the monomer feed rate and M is the molecular weight (FM is thus the monomer mass feed rate), it was found that Rp/FM is uniquely related to the parameter W/FM where W is the discharge power in Watts. It was shown that many polymer properties were also determined mainly by the same composite parameter. It was also found that the presence of O2 gas in the monomer feed reduced the carbon content in the polymer and made the surface more hydrophobic while O2 plasma treatment of the plasma polymer rendered the surface more hydrophilic. © 1983.
A. K. Sharma and H. Yasuda, "Plasma Polymerization Of Tetramethyldisiloxane By A Magnetron Glow Discharge," Thin Solid Films, vol. 110, no. 2, pp. 171 - 184, Elsevier, Dec 1983.
The definitive version is available at https://doi.org/10.1016/0040-6090(83)90221-3
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09 Dec 1983