Synthesis and Characterization of Polyimidothioethers
Polyimidothioethers were synthesized as possible polymers for evaluation as X-ray resists. These polymers were varied in the ratio of the monomers and in their structures. Aliphatic thiols, bismaleimides, and iodonium monomers were used. the composition was varied using ratios of the bisimide to iodonium of 9:1, 8:2, 7:3, 6:4, 5:5, and 0:1. the ratio of the thiols, containing 6 to 10 - CH2 - groups, to the monomers was 1:1. the synthesis and characterization of the intermediate compounds and polymers are described in detail.
A. S. Koelling et al., "Synthesis and Characterization of Polyimidothioethers," Journal of Applied Polymer Science, Wiley-Blackwell, Jan 1992.
The definitive version is available at https://doi.org/10.1002/app.1992.070450414
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© 1992 Wiley-Blackwell, All rights reserved.
01 Jan 1992