A new class of optical oxygen sensor that can be photopatternable by traditional UV lithography is presented. They are fabricated using photopatternable spin-on silicone (polydimethylsiloxane, PDMS) with oxygen sensitive luminescent dyes. It has a good adhesion property and can be applied on glass or on photopolymer (SU-8) without any additional surface treatments. The optimum mixture composition for patternable oxygen sensitive membranes is investigated and its optical properties are characterized. Proof-of-concepts for two applications, intensity-based oxygen sensing with SU-8 based structure and self-calibration fluidic oxygen sensor, are described. These photopatternable optical membranes will find many applications wherever small patterns of oxygen sensitive membranes are required.
R. Ambekar et al., "Photopatternable Polymeric Membranes for Optical Oxygen Sensors," IEEE Sensors Journal, vol. 9, no. 2, pp. 169-175, Institute of Electrical and Electronics Engineers (IEEE), Feb 2009.
The definitive version is available at https://doi.org/10.1109/JSEN.2008.2011069
Chemical and Biochemical Engineering
Electrical and Computer Engineering
National Institutes of Health (U.S.)
National Science Foundation (U.S.)
Keywords and Phrases
Fluidics; Ruthenium; Oxygen; Porphyrins; Silicones
International Standard Serial Number (ISSN)
Article - Journal
© 2009 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.