Abstract

A device for measuring a property of a substrate comprises an enclosure,two resonators,and two probes.The substrate has a top surface, and the enclosure defines a cavity for placing the substrate. The resonators extend into the cavity of the enclosure. The probes extend into the cavity, and each of the probes comprises a loop that extends about an axis that is substantially parallel to the top surface of the substrate so that the probes are operable to excite a transverse magnetic mode signal in the cavity.

Department(s)

Electrical and Computer Engineering

Comments

Docket Number: 21MST022-UTL

Filing Date: 06/26/2024

Issue Date: 06/23/2026, FY26

References Cited

U.S. Patent Documents:

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Foreign Patent Documents:

KR 10-2014-0083055 A 7/2014

KR 10-2016-0002074 1/2016

Prior Publication Data:

US 2025/0070443 A 1 February 27, 2025

Patent Application Number

18/724,406

Patent Number

US 12,665,278 B2

Document Type

Patent

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2026 The Curators of the University of Missouri, All rights reserved

Additional Rights Information

Assignee: The Curators of the University of Missouri, Columbia, Missouri (US)

Publication Date

23 June, 2026

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