Abstract

A miniature, micrometer-accuracy, three-dimensional (3D) position-to-optical displacement sensor that has at least one extrinsic Fabry-Perot interferometer (EFPI) in Z direction and a series of plasmonic metasurface resonators with distinctive wavelength-selective characteristics in X and Y directions. The interferometer comprises at least one single mode optic fiber for light propagation, and a substrate mirror to create a light interference fringe as a function of distance between the mirror and the distal end of the optic fiber. Each plasmonic resonator is capable of modifying the substrate mirror and comprises an array of multiple unit nanostructure unit cells that are arranged in a two-dimensional (2D) square lattice or array in the X-Y plane. The nanostructure unit cells are preferably inscribed in the top layer of a three-layer thin film via the focused ion beam (FIB).

Department(s)

Civil, Architectural and Environmental Engineering

Second Department

Mechanical and Aerospace Engineering

Comments

Docket Number: 20MST036-UTL

Filing Date: 10/14/2022

Issue Date: 07/02/2024, FY25

References Cited

U.S. Patent Documents:

5,402,236 A 3/1995 Brown et al.

2005/0195403 A1* 9/2005 Xu…............G01D5/268 356/480

2015/0049487 A1 2/2015 Connor

2015/0077736 A1* 3/2015 Reinsch...............G01N 12/55 356/32

2019/0155124 A1* 5/2019 Park...............G01B 9/02028

2022/0057283 A1* 2/2022 Carini...............G01M 5/0041

Foreign Patent Documents:

WO 2018050346 A1 3/2018

Prior Publication Data:

US 2023/0160685 A1 May 25, 2023

Patent Application Number

17/919,158

Patent Number

US 12,025,438 B2

Document Type

Patent

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2026 The Curators of the University of Missouri, All rights reserved

Additional Rights Information

Assignee: The Curators of the University of Missouri, Columbia, Missouri (US)

Publication Date

2 July, 2024

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