Title

Molecular Dynamics Simulation of Friction for MEMS Application

Abstract

Adhesion and dry sliding friction are modeled and simulated using molecular dynamics principles in this study. The interaction between two aluminum surfaces is simulated since the focus of this study is on the atomic-scale frictional characterization of metallic microcomponents. The Morse potential function is used to calculate the intra- and inter-atomic forces between the atoms of the sliding surfaces. Results are presented that simulate the adhesion process when the surfaces come in contact. Also, the calculated coefficient of friction for various values of contact pressure, sliding speed and asperity level are presented. The general trends observed here agree with the results obtained by other researchers for different materials.

Meeting Name

ASME International Mechanical Engineering Congress (2003: Nov. 15-21; Washington, DC)

Department(s)

Mechanical and Aerospace Engineering

Sponsor(s)

ASME. Design Engineering Division

Keywords and Phrases

Adhesion; Aluminum; Computer simulation; Failure (mechanical); Friction; Integrated circuits; Molecular dynamics; Asperity; Morse potential; Microelectromechanical devices; Metallic MEMS; Molecular dynamics simulation

International Standard Serial Number (ISSN)

15214613

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2003 American Society of Mechanical Engineers (ASME), All rights reserved.


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