Title

Design and Control of a Mems Micropositioner Array for Coordinated Motion Tasks

Editor(s)

Ludwick, Stephen J. and Aguirre, Luis A.

Meeting Name

26th ASPE Annual Meeting, 2011

Department(s)

Mechanical and Aerospace Engineering

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2011 American Society of Precision Engineering, All rights reserved.

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