"Micro-electro-mechanical system design and implementation is a field that has received much attention over the past few decades. These robotic systems with features on the micro-scale have an unparalleled opportunity to change the way scientists interact with and understand micro and nano-scale phenomenon. Their capabilities allow experimentation that cannot be achieved with standard macro-scale equipment. Potential applications range from observing biological processes in living cells, to smart materials that automatically detect microcracks. So far, however, only a few truly successful applications have been realized. One of the most elusive goals in MEMS design is creating a system capable of coordinated motion tasks. This task requires an innovative approach to mechanism design and control.
In this work a novel micro-positioning stage is presented that is intended to be implemented in a very large scale array. The stages are actuated by custom optimized electro-thermal-compliant micro-actuators intended for high force applications. These actuators, in combination with mechanical amplification, enable a high degree of mobility which allows a large work area. Furthermore the stage itself has a small foot print to allow a high density of actuators to interact in the common workspace. Control of the stages is realized using vision feedback with Kalman Filtering for high-speed intersample estimation. An iterative learning controller is then used for high precision tracking. This approach gives a high degree of accuracy that is nearly as good as the resolution of the measurement system, and at frequencies that approach the bandwidth of the system"--Abstract, page iii.
Bristow, Douglas A.
Midha, A. (Ashok)
Landers, Robert G.
Mechanical and Aerospace Engineering
M.S. in Mechanical Engineering
Missouri Research Board
Missouri University of Science and Technology
xii, 138 pages
© 2011 Patrick Jesse White, All rights reserved.
Thesis - Open Access
Electronic OCLC #
White, Patrick Jesse, "Design and control of a multi-axis micro-electro-mechanical system array for coordinated micro-manipulation" (2011). Masters Theses. 7748.