Chemical Failure Mode Addition to the Failure Mode Taxonomy
Abstract
The research objective of this article is to fortify the failure mode taxonomy by including chemical failures. This inclusion would enable comprehensive risk analysis in technology-based products. As technology improves at an exponential rate, partially owing to chemical advances in the semiconductor industry, failure identification tools must keep up with the pace. While the current version of the failure mode taxonomy does consider multiple domains of failure, it does not include a comprehensive collection of chemical failures. Therefore this taxonomy is insufficient for a large number of new products. The research presented here includes identifying chemical failures from publications in the semiconductor industry. These failures were then analyzed to determine the rudimentary failure modes in each case. Finally the newly identified failure modes were added to the failure mode taxonomy. A case study is presented to demonstrate using the updated failure mode taxonomy to identify both potential failures and product risks.
Recommended Citation
C. Washburn and K. Grantham, "Chemical Failure Mode Addition to the Failure Mode Taxonomy," Journal of Failure Analysis and Prevention, vol. 12, no. 6, pp. 660 - 669, ASM International, Dec 2012.
The definitive version is available at https://doi.org/10.1007/s11668-012-9603-z
Department(s)
Engineering Management and Systems Engineering
Keywords and Phrases
Chemical; Failure analysis; Failure mode; Lithography; Taxonomy
International Standard Serial Number (ISSN)
1547-7029; 1864-1245
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2012 ASM International, All rights reserved.
Publication Date
01 Dec 2012
