Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing
This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.
C. Lin et al., "Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing," Applied Physics A: Materials Science and Processing, Springer-Verlag, Dec 2009.
The definitive version is available at https://doi.org/10.1007/s00339-009-5350-8
Electrical and Computer Engineering
Mechanical and Aerospace Engineering
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