Title

Broadband Measurement of ESD Risetimes to Distinguish between Different Discharge Mechanisms

Abstract

Different discharge mechanisms are possible for electrostatic discharge below 2000 V breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.

Department(s)

Electrical and Computer Engineering

Sponsor(s)

German Research Association

Keywords and Phrases

CMD Testing; ESD Discharge Mechanisms; ESD Reproductivity; ESD Risetimes; Arc Formation; Breakdown Voltage; Reproducibility; Short Gap; Surface Process

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2002 Elsevier, All rights reserved.


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