Broadband Measurement of ESD Risetimes to Distinguish between Different Discharge Mechanisms
Different discharge mechanisms are possible for electrostatic discharge below 2000 V breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.
S. Bönisch et al., "Broadband Measurement of ESD Risetimes to Distinguish between Different Discharge Mechanisms," Journal of Electrostatics, Elsevier, Oct 2002.
The definitive version is available at http://dx.doi.org/10.1016/S0304-3886(02)00056-6
Electrical and Computer Engineering
German Research Association
Keywords and Phrases
CMD Testing; ESD Discharge Mechanisms; ESD Reproductivity; ESD Risetimes; Arc Formation; Breakdown Voltage; Reproducibility; Short Gap; Surface Process
Article - Journal
© 2002 Elsevier, All rights reserved.