Abstract
Energy spread and extracted current measurements are presented for five different types of ion sources: hot cathode, cold cathode, magnetron, microwave, and electron cyclotron resonance (ECR). The measurements were performed with a 45° parallel-plate energy analyzer with a resolution of better than 0.5 eV at 500 eV incident energy. Energy spreads ranged from 0.5 to 4 eV, while total extracted beam currents ranged from 2 to 30 μA. Beam currents due specifically to protons, 3He++ ions, and H +2 ions are also presented. The ECR and magnetron sources gave the best overall performance. These, along with the energy analyzer, are currently being used in experiments to study ion-atom collision physics. © 1994 American Institute of Physics.
Recommended Citation
A. D. Gaus et al., "Energy Spread and Ion Current Measurements of Several Ion Sources," Review of Scientific Instruments, vol. 65, no. 12, pp. 3739 - 3745, American Institute of Physics, Dec 1994.
The definitive version is available at https://doi.org/10.1063/1.1144500
Department(s)
Physics
Publication Status
Available Access
International Standard Serial Number (ISSN)
0034-6748
Document Type
Article - Journal
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 2024 American Institute of Physics, All rights reserved.
Publication Date
01 Dec 1994
