We present the integrated chip-scale tuning of multiple photonic crystal cavities. The optimized implementation allows effective and precise tuning of multiple cavity resonances (up to ~1.60 nm/mW) and intercavity phase (~0.038 π/mW) by direct local temperature tuning on suspended silicon nanomembranes. Through designing the serpentine metal electrodes and careful electron-beam alignment to avoid cavity mode overlap, the coupled photonic crystal L3 cavities preserve their high quality factors. The deterministic resonance and phase control enables switching between the all-optical analog of electromagnetically-induced-transparency to flat-top filter lineshapes, with future applications of trapping photons and optoelectronic modulators.
T. Gu et al., "Deterministic Integrated Tuning of Multicavity Resonances and Phase for Slow-Light in Coupled Photonic Crystal Cavities," Applied Physics Letters, vol. 98, American Institute of Physics (AIP), Mar 2011.
The definitive version is available at https://doi.org/10.1063/1.3571283
Mechanical and Aerospace Engineering
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© 2011 American Institute of Physics (AIP), All rights reserved.
01 Mar 2011