Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors
This study describes the effect of variations in shape and membrane thickness in capacitive pressure sensors. Specifically, square, rectangular and circular shapes were considered with three different membrane thicknesses. Capacitive changes and membrane deformations with respect to pressure variation were computed using the IntelliSuite simulation software, and the sensitivity of the sensor was assessed. Square-shaped pressure sensor with least membrane thickness was found to be more sensitive than the circular and rectangular shaped sensors, with the rectangular one showing the least sensitivity.
A. Sabet and X. J. Avula, "Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors," 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings, Nano Science and Technology Institute (NSTI), Jan 2006.
2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings (2006, Boston, MA)
Mechanical and Aerospace Engineering
Article - Conference proceedings
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