Energy Transport and Nanostructuring of Dielectrics by Femtosecond Laser Pulse Trains

Abstract

This study analyzes single burst ablation of dielectrics by a femtosecond pulse train that consists of one or multiple pulses. It is found that (1) there exist constant-ablation-depth zones with respect to fluence for one or multiple pulses per train and (2) for the same total fluence per train, although the ablation depth decreases in multiple pulses as compared to that of a single pulse, the depth of the constant-ablation-depth zone decreases. In other words, repeatable structures at the desired smaller nanoscales can be achieved in dielectrics by using the femtosecond pulse train technology, even when the laser fluence is subject to fluctuations. The predicted trends are in agreement with published experimental data.

Department(s)

Mechanical and Aerospace Engineering

Keywords and Phrases

Dielectric Materials; High-Speed Optical Techniques; Laser Ablation; Nanostructured Materials; Nanotechnology; Reflectivity; Silicon Compounds

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2006 American Society of Mechanical Engineers (ASME), All rights reserved.

Publication Date

01 Jan 2006

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