Substrate-blind Photonic Integration Based On High-index Glass Materials
Conventional photonic integration technologies are inevitably substrate-dependent, as different substrate platforms stipulate vastly different device fabrication methods and processing compatibility requirements. Here we capitalize on the unique monolithic integration capacity of composition-engineered non-silicate glass materials (amorphous chalcogenides and transition metal oxides) to enable multifunctional, multi-layer photonic integration on virtually any technically important substrate platforms. We show that high-index glass film deposition and device fabrication can be performed at low temperatures (< 250 °C) without compromising their low loss characteristics, and is thus fully compatible with monolithic integration on a broad range of substrates including semiconductors, plastics, textiles, and metals. Application of the technology is highlighted through three examples: demonstration of high-performance mid-IR photonic sensors on fluoride crystals, direct fabrication of photonic structures on graphene, and 3-D photonic integration on flexible plastic substrates.
H. Lin and L. Li and Y. Zou and Q. Du and O. Ogbuu and C. Smith (Lonergan) and E. Koontz and D. Musgraves and K. Richardson and J. Hu, "Substrate-blind Photonic Integration Based On High-index Glass Materials," Proceedings of SPIE - The International Society for Optical Engineering, vol. 9277, article no. 92770T, Society of Photo-optical Instrumentation Engineers, Jan 2014.
The definitive version is available at https://doi.org/10.1117/12.2073972
Materials Science and Engineering
Keywords and Phrases
Chalcogenide glasses; flexible photonics; graphene; integrated optical devices; metal oxides; resonators; sensors; waveguides
International Standard Book Number (ISBN)
International Standard Serial Number (ISSN)
Article - Conference proceedings
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01 Jan 2014