"Thin film techniques may be the key to future miniaturization of electrical equipment. The purpose of this thesis was to develop procedures for deposition of thin film resistors and to test these deposited resistors. Starting with a vacuum system, equipment was designed and built to hold and heat the substrate, monitor the substrate temperature and deposited resistance, and to evaporate the material to be deposited. Resistors were deposited and tested for resistance between resistors, capacitance between resistors, and resistance of resistors. A heat aging test was also used comparing resistors with and without a silicon monoxide coating"--Abstract, page ii.
Nolte, Roger E.
Gerson, Robert, 1923-2013
Johnson, Charles A.
Skitek, G. G. (Gabriel G.)
Electrical and Computer Engineering
M.S. in Electrical Engineering
University of Missouri at Rolla
v, 49 pages
© 1965 Rollie R. Herzog, All rights reserved.
Thesis - Open Access
Library of Congress Subject Headings
Electric resistors, Film
Print OCLC #
Electronic OCLC #
Link to Catalog Record
Herzog, Rollie R., "Thin film resistor deposition" (1965). Masters Theses. 5351.