Metal-organic Chemical Vapor Deposition of Sr-Co-Fe-O Films on Porous Substrates

C.-F. Xia
P. Atanasova
Robert W. Schwartz, Missouri University of Science and Technology
T. L. Ward

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Aerosol-assisted chemical vapor deposition using the b-diketonate precursors Sr(tmhd)2•2H2O, Fe(tmhd)3 and Co(tmhd)3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1-yO3-d onto porous a-Al2O3 substrates. Single-phase SrCoyFe1-yO3-d perovskite films were obtained at a deposition temperature of 550°C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films. The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric-pressure, and led to a supported film which was leak-tight to N2 flow.