Configuration for Micro pH Sensor

Young-Jin Kim
Young-Chul Lee
Byung-Ki Sohn
Chang-Soo Kim, Missouri University of Science and Technology
Jung-Hee Lee

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A fully integrated pH sensor with a built-in reference electrode is proposed. An iridium oxide microelectrode and a pH-insensitive field-effect transistor are used as a pH sensor and a reference electrode, respectively. The sensitivity of the proposed device matches well with the estimated value to within 0.3 mV/pH deviation.