Defect Characterization and Yield Analysis of Array-Based Nanoarchitecture

Shanrui Zhang
Minsu Choi, Missouri University of Science and Technology
Nohpill Park

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With molecular-scale materials and fabrication techniques recently developed, high-density computing systems in nanometer domain emerge. An array-based nanoarchitecture has been recently proposed based on nanowires such as carbon nanotubes (CNTs), silicon nanowires (SiNWs). High-density nanoarray-based systems consisting of nanometer-scale elements are likely to have many imperfections; thus, defect-tolerance is considered as one of the most significant challenges. In this paper, we propose a probabilistic yield model for the array-based nanoarchitecture. The proposed yield model can be used 1) to accurately estimate the raw and net array densities, and 2) to design and optimize more defect and fault-tolerant systems based on the array-based nanoarchitecture.