Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing
Abstract
This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.
Recommended Citation
C. Lin et al., "Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing," Applied Physics A: Materials Science and Processing, Springer-Verlag, Dec 2009.
The definitive version is available at https://doi.org/10.1007/s00339-009-5350-8
Department(s)
Electrical and Computer Engineering
Second Department
Mechanical and Aerospace Engineering
International Standard Serial Number (ISSN)
0947-8396
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2009 Springer-Verlag, All rights reserved.
Publication Date
01 Dec 2009
