Self-Powered Wireless Sensor Node Enabled by an Aerosol-Deposited PZT Flexible Energy Harvester
A piezoelectric aerosol-deposited (AD) Pb(Zrx,Ti1-x)O3 (PZT) film prepared with single-step deposition and postannealing was successfully utilized to fabricate a high-performance flexible piezoelectric harvester via a fast, simple, and cost-effective method. The high temperature-annealed AD PZT thick film on a rigid sapphire substrate was transferred onto a flexible substrate by the inoranic-based laser lift-off process. The flexible PZT harvester can convert a maximum output voltage of 200 V and a current signal of 35 ÎœA from biomechanical bending motions, which are comparable to those of a similar interdigitated electrode-type flexible single-crystal energy harvester. The high-output performance of the energy harvester originates from the large grain growth of the PZT ceramic film under the high temperature annealing process at 900°C, which leads to outstanding piezoelectric harvesting properties with robust endurance for up to around 115,000 bending cycles on a flexible substrate.
G. Hwang et al., "Self-Powered Wireless Sensor Node Enabled by an Aerosol-Deposited PZT Flexible Energy Harvester," Advanced Energy Materials, vol. 6, no. 13, Wiley-VCH Verlag, Jul 2016.
The definitive version is available at https://doi.org/10.1002/aenm.201600237
Electrical and Computer Engineering
Electromagnetic Compatibility (EMC) Laboratory
Keywords and Phrases
aerosol-deposited PZT; energy harvesting; piezoelectric films; self-powered devices; wireless sensor nodes
International Standard Serial Number (ISSN)
Article - Journal
© 2016 Wiley-VCH Verlag, All rights reserved.
01 Jul 2016