Femtosecond Laser Processing of Glass Materials for Assembly-Free Fabrication of Photonic Microsensors
Research and development in photonic micro/nano devices and structures have experienced a significant growth in recent years, fueled by their broad applications as sensors for in situ measurement of a wide variety of physical, chemical and biological quantities. Recent advancement in ultrafast and ultra-intense pulsed laser technology has opened a new window of opportunity for one-step fabrication of micro- and even nano-scale 3D structures in various solid materials. When used for fabrication, fs lasers have many unique advantages such as negligible cracks, minimal heat-affected-zone, low recast, and high precision. These advantages enable the unique opportunity to fabricate integrated sensors with unprecedented performance, enhanced functionalities and improved robustness. This paper summarizes our recent research progresses in the understanding, design, fabrication, characterization of various photonic sensors for energy, defense, environmental, biomedical and industry applications. Femtosecond laser processing/ablation of various glass materials (fused silica, doped silica, sapphire, etc.) is discussed towards the goal of one-step fabrication of novel photonic sensors and new enabling photonic devices. A number of new photonic devices and sensors are also presented.
L. Yuan et al., "Femtosecond Laser Processing of Glass Materials for Assembly-Free Fabrication of Photonic Microsensors," Advances in Science and Technology, vol. 90, pp. 166-173, Trans Tech Publications, Oct 2014.
The definitive version is available at https://doi.org/10.4028/www.scientific.net/AST.90.166
13th International Ceramics Congress, part of CIMTEC 2014-13th International Ceramics Congress and 6th Forum on New Materials (2014: Jun. 8-13, Montecatini Terme, Italy)
Electrical and Computer Engineering
Keywords and Phrases
Femtosecond laser micromachining; Glass material; Photonic sensor
International Standard Book Number (ISBN)
International Standard Serial Number (ISSN)
Article - Conference proceedings
© 2014 Trans Tech Publications, All rights reserved.