A Cantilever Based Optical Fiber Acoustic Sensor Fabricated by Femtosecond Laser Micromachining


In this paper, we present a pure silica micro-cantilever based optical fiber sensor for acoustic wave detection. The cantilever is directly fabricated by fs laser micromachining on an optical fiber tip functioning as an inline Fabry-Perot interferometer (FPI). The applied acoustic wave pressurizes the micro-cantilever beam and the corresponding dynamic signals can be probed by the FPI. The thickness, length, and width of the micro-cantilever beam can be flexibly designed and fabricated so that the sensitivity, frequency response, and the total measurement range can be varied to fit many practical applications. Experimental results will be presented and analyzed. Due to the assembly free fabrication of the fs-laser, multiple micro-cantilever beams could be potentially fabricated in/on a single optical fiber for quasi-distributed acoustic mapping with high spatial resolution.

Meeting Name

SPIE LASE (2016: Feb. 15-18, San Francisco, CA)


Electrical and Computer Engineering

Keywords and Phrases

Acoustic devices; Acoustic equipment; Acoustic waves; Cantilever beams; Composite micromechanics; Fabrication; Fabry-Perot interferometers; Fiber optic sensors; Fibers; Frequency response; Manufacture; Micromachining; Nanocantilevers; Optical fibers; Ultrashort pulses, Acoustic wave detection; cantilever; Femtosecond laser micromachining; Fiber acoustic sensors; High spatial resolution; Measurement range; Microcantilever beams; Single optical fibers, Optical fiber fabrication; Cantilever; Femtosecond laser micromachining; Fiber acoustic sensor

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Article - Conference proceedings

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Publication Date

01 Apr 2016