A Novel Two-Step Minimal-Power-Dissipation Control Method for Magnetically Levitated Planar Motor


Magnetically levitated planar motors have wide application prospects in many high-precision industrial apparatus, such as wafer steppers. Based on the dq (d-axis and q-axis) transformation and the Moore-Penrose inverse transformation, a new minimal-power-dissipation (MFD) control method for the linear actuator used in planar motors is systematically presented. Moreover, it is proven that the inverse of Park's transformation is exactly the MPD transformation when the zero-axis current equals to zero. More importantly, we put forward a novel two-step MPD control method for planar motors for the first time. Compared with previous studies, this method can calculate the force allocation among all actuators in its first step. Therefore, taking the prototype as an example, this two-step method can be used to analyze the relationship between the actuator-force allocation and the power dissipation, and then optimize the mechanical topology of the mover to reduce the power dissipation. The validity of this two-step method is verified with a detailed analytical proof. The same approach can be applied to similar types of planar motors with the structure of symmetrical three-phase windings.


Electrical and Computer Engineering

Keywords and Phrases

Linear actuator; Magnetically levitated; Minimal power dissipation; Planar motor

International Standard Serial Number (ISSN)


Document Type

Article - Journal

Document Version


File Type





© 2012 Praise Worthy Prize, All rights reserved.

Publication Date

01 Feb 2012

This document is currently not available here.