Abstract
An apparatus for inspecting a sample for defects includes a signal generator for generating a signal and a device for splitting the signal into two separate signals which have substantially equal phase and magnitude. A sensor radiates the two signals on the sample and receives the two signals reflected from the sample. A device is provided for determining a difference between the two signals reflected from the sample without unwanted influence of variations of distance between the sensor and sample, and reflections from nearby sample edges and boundaries. A defect is determined to exist when a difference is found between the two reflected signals.
Recommended Citation
R. Zoughi et al., "Method and Apparatus for Nondestructive Sample Inspection," U.S. Patents, Mar 2007.
Department(s)
Electrical and Computer Engineering
Patent Application Number
US10/920,723
Patent Number
US7190177B2
Document Type
Patent
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 2007 The Curators of the University of Missouri, All rights reserved.
Publication Date
13 Mar 2007
