An apparatus for inspecting a sample for defects includes a signal generator for generating a signal and a device for splitting the signal into two separate signals which have substantially equal phase and magnitude. A sensor radiates the two signals on the sample and receives the two signals reflected from the sample. A device is provided for determining a difference between the two signals reflected from the sample without unwanted influence of variations of distance between the sensor and sample, and reflections from nearby sample edges and boundaries. A defect is determined to exist when a difference is found between the two reflected signals.
R. Zoughi et al., "Method and Apparatus for Nondestructive Sample Inspection," U.S. Patents, Mar 2007.
Electrical and Computer Engineering
Patent Application Number
© 2007 The Curators of the University of Missouri, All rights reserved.
13 Mar 2007