A new principle of an amperometric actuation technique was incorporated in the ISFET glucose sensor. The ISFET is fabricated by the CMOS process and the platinum working electrode is deposited by the lift-off process. A sensor with a specially designed ladder type working electrode exhibits improved operation in response time, response magnitude and detection range. An expectation concerning the reduction of sensor size is also discussed.

Meeting Name

1997 International Conference on Solid State Sensors and Actuators, 1997


Electrical and Computer Engineering

Second Department

Chemical and Biochemical Engineering

Keywords and Phrases

CMOS Process; ISFET Glucose Sensor; Pt; Amperometric Actuation Technique; Biosensors; Chemical Sensors; Detection Range; Ion Sensitive Field Effect Transistors; Ladder Type Working Electrode; Lift-Off Process; Microactuators; Microelectrodes; Patient Monitoring; Response Magnitude; Response Time; Sensor Size; Structure Actuation System; Working Electrode

Document Type

Article - Conference proceedings

Document Version

Final Version

File Type





© 1997 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.

Publication Date

01 Jan 1997