The design of silicon-based polyimide as a submicron resolution directly imagable electron-beam resist
Ph. D. in Chemistry
University of Missouri--Rolla
xii, 157 pages
© 1989 Benjamin Chung-Peng Ho, All rights reserved.
Dissertation - Citation
Print OCLC #
Link to Catalog Record
Full-text not available: Request this publication directly from Missouri S&T Library or contact your local library.http://merlin.lib.umsystem.edu/record=b2225474~S5
Ho, Benjamin Chung-Peng, "The design of silicon-based polyimide as a submicron resolution directly imagable electron-beam resist" (1989). Doctoral Dissertations. 717.
Share My Dissertation If you are the author of this work and would like to grant permission to make it openly accessible to all, please click the button above.