Structure and properties of metal and alloy thin films prepared by plasma-enhanced metalorganic chemical vapor deposition
Chemical and Biochemical Engineering
Ph. D. in Chemical Engineering
University of Missouri--Rolla
xiv, 160 pages
© 1987 Tyau-Jeen Lin, All rights reserved.
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Full-text not available: Request this publication directly from Missouri S&T Library or contact your local library.http://merlin.lib.umsystem.edu/record=b2066796~S5
Lin, Tyau-Jeen, "Structure and properties of metal and alloy thin films prepared by plasma-enhanced metalorganic chemical vapor deposition" (1987). Doctoral Dissertations. 652.
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