Title

Atomic Layer Deposited Conformal Ceramic Coatings for Anti-Corrosion of Ag Nanoparticles

Abstract

The goal of this work is to explore atomic layer deposition (ALD) as a thin film coating technique to inhibit corrosion of metal nanoparticles, given the technique's ability to form a conformal coating on high aspect ratio substrates. Various coating materials, including Al2O3, ZrO2, HfO2, and TiO2 of different thicknesses were coated on Ag nanoparticles (NPs) in a fluidized bed ALD reactor. To avoid sintering of Ag NPs during the ALD process, the reaction temperature was set to 100 °C, lower than typical ALD reaction temperatures for these metal oxides. The ultrathin coatings (up to ~10 nm thick) were conformally deposited on the surface of Ag NPs. During the corrosion tests in a neutral 3.5 wt% NaCl solution, the corrosion current density was lowered by more than one order of magnitude; in an acid 0.5 M H2SO4 solution, the stabilities of different thin coatings were compared. Ultraviolet–visible spectra of coated Ag NPs showed retention of surface plasmonic resonance.

Department(s)

Chemical and Biochemical Engineering

Comments

U.S. Department of Energy, Grant DE-NA0002839

Keywords and Phrases

Ag nanoparticles; Atomic layer deposition; Corrosion; Thin films

International Standard Serial Number (ISSN)

0169-4332

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2021 Elsevier, All rights reserved.

Publication Date

01 Dec 2020

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