The present invention generally relates to porous ceramic material and to methods of making and using the material. More particularly, the invention relates to methods of forming ceramic materials by depositing material, using atomic layer deposition, onto a sacrificial substrate and to ceramic materials having controlled wall thickness, relatively large pores, and high surface area by weight.
A. W. Weimer and X. Liang, "Highly Porous Ceramic Material and Method of using and Forming the Same,", Nov 2018.
Chemical and Biochemical Engineering
Intelligent Systems Center
Patent Application Number
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27 Nov 2018