Abstract

The present invention generally relates to porous ceramic material and to methods of making and using the material. More particularly, the invention relates to methods of forming ceramic materials by depositing material, using atomic layer deposition, onto a sacrificial substrate and to ceramic materials having controlled wall thickness, relatively large pores, and high surface area by weight.

Department(s)

Chemical and Biochemical Engineering

Research Center/Lab(s)

Intelligent Systems Center

Patent Number

10,138,169

Document Type

Patent

Document Version

Final Version

File Type

text

Language(s)

English

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