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| Title: | A new approch to low drift Ta₂O₅ by pH reactive sputtering and sol-gel method | |
| Alternate Title: | A new approch to low drift Ta2O5 by pH reactive sputtering and sol-gel method | |
| Author (s): | Dae-Hyuk Kwon Byung-Woog Cho Kim, Chang-Soo Byung-Ki Sohn | |
| Department/Lab Affiliations: | Biological Sciences Electrical and Computer Engineering Intelligent Microsystem Laboratory | |
| Issue Date: | 1995 | |
| Publisher: | Institute of Electrical and Electronics Engineers | |
| Citation: | Dae-Hyuk Kwon; Byung-Woog Cho; Chang-Soo Kim; Byung-Ki Sohn, "A New Approch To Low Drift Tasub2Osub5 By pH Reactive Sputtering And Sol-gel Method" Transducers '95. The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX., vol.2, pp.917-920, 25-29 Jun 1995 | |
| Type: | Article - Conference proceedings text | |
| Copyright Notice: | This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. FULL COPYRIGHT INFORMATION: | |
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| title | A new approch to low drift Ta₂O₅ by pH reactive sputtering and sol-gel method | |
| title.alternative | A new approch to low drift Ta2O5 by pH reactive sputtering and sol-gel method | |
| contributor.author | Dae-Hyuk Kwon | |
| contributor.author | Byung-Woog Cho | |
| contributor.author | Kim, Chang-Soo | |
| contributor.author | Byung-Ki Sohn | |
| contributor.deptlab | Biological Sciences | |
| contributor.deptlab | Electrical and Computer Engineering | |
| contributor.deptlab | Intelligent Microsystem Laboratory | |
| date.issued | 1995 | |
| date.submitted | 2007 | |
| publisher | Institute of Electrical and Electronics Engineers | |
| identifier.citation | Dae-Hyuk Kwon; Byung-Woog Cho; Chang-Soo Kim; Byung-Ki Sohn, "A New Approch To Low Drift Tasub2Osub5 By pH Reactive Sputtering And Sol-gel Method" Transducers '95. The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX., vol.2, pp.917-920, 25-29 Jun 1995 | |
| identifier.pub.URI | ||
| type | Article - Conference proceedings | |
| type.DCMIType | text | |
| type.status | Final version | |
| rights | This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. | |
| rights.URI | ||
| date.accessioned | 2007-04-05T14:04:28Z | |
| date.available | 2007-04-05T14:04:28Z | |
| identifier.persist.URI | ||
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