Title

Surface-Enhanced Raman Scattering Microchip Fabricated by Femtosecond Laser

Abstract

We report a surface-enhanced Raman scattering (SERS) microchip that is capable of measuring SERS signals of liquid samples with high sensitivity. The microdevice is an integration of a silicon-based SERS substrate, a multimode optical fiber (MMF), and a microchannel embedded in the photosensitive glass fabricated by the femtosecond laser followed by thermal treatment, wet etching, and annealing. The performance of the SERS microchip is evaluated by measuring rhodamine 6G using a 632.8nm He-Ne laser at 4.3mW excitation power, which reveals that the detection limit is lower than 10 -10M at a 1s short accumulation time.

Department(s)

Mechanical and Aerospace Engineering

Second Department

Electrical and Computer Engineering

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2010 Optical Society of America, All rights reserved.


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