Real-Time Depth Measurement for Micro-Holes Drilled by Lasers
Abstract
An optical system based on the confocal principle has been developed for real-time precision measurements of the depth of micro-holes during the laser drilling process. The capability of the measuring system is theoretically predicted by the Gaussian lens formula and experimentally validated to achieve a sensitivity of 0.5 µm. A nanosecond laser system was used to drill holes, and the hole depths were measured by the proposed measuring system and by the cut-and-polish method. The differences between these two measurements are found to be 5.0% for hole depths on the order of tens of microns and 11.2% for hundreds of microns. The discrepancies are caused mainly by the roughness of the bottom surface of the hole and by the existence of debris in the hole. This system can be easily implemented in a laser workstation for the fabrication of 3D microstructures.
Recommended Citation
C. Lin et al., "Real-Time Depth Measurement for Micro-Holes Drilled by Lasers," Measurement Science and Technology, Institute of Physics - IOP Publishing, Jan 2010.
The definitive version is available at https://doi.org/10.1088/0957-0233/21/2/025307
Department(s)
Mechanical and Aerospace Engineering
Second Department
Electrical and Computer Engineering
International Standard Serial Number (ISSN)
0957-0233
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2010 Institute of Physics - IOP Publishing, All rights reserved.
Publication Date
01 Jan 2010
